1 科技部高技术中心材料处, 北京 100044
2 中国科学院半导体研究所 集成光电子学国家重点联合实验室, 北京 100083
3 中国科学院大学 材料科学与光电技术学院, 北京 100049
4 中国科学院大学 材料与光电研究中心, 北京 100049
二氧化硅平面光波导(PLC)器件以其低损耗、高工艺容差, 以及与CMOS工艺兼容和与单模光纤模场匹配良好等优点, 在光通信、光互连和集成光学中得到了广泛的应用。文章综述了二氧化硅平面光波导器件及其应用的进展, 重点针对分束器、阵列波导光栅、可调光衰减器及其集成器件的最新研究进行了介绍, 对未来发展趋势进行了展望。
有源光子集成波导器件 无源光子集成波导器件 集成光学 光通信系统 active photonic integrated waveguide devices passive photonic integrated waveguide devices integrated optics optical communication system
Author Affiliations
Abstract
1 State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3 Division of Quantum Materials and Devices, Beijing Academy of Quantum Information Sciences, Beijing 100193, China
4 Laboratory of Quantum Information, CAS, University of Science and Technology of China, Hefei 230026, China
Quantum key distribution (QKD) provides a solution for communication of unconditional security. However, the quantum channel disturbance in the field severely increases the quantum bit-error rate, degrading the performance of a QKD system. Here we present a setup comprising silica planar light wave circuits (PLCs), which is robust against the channel polarization disturbance. Our PLCs are based on the asymmetric Mach–Zehnder interferometer (AMZI), integrated with a tunable power splitter and thermo-optic phase modulators. The polarization characteristics of the AMZI PLC are investigated by a novel pulse self-interfering method to determine the operation temperature of implementing polarization insensitivity. Over a 20 km fiber channel with 30 Hz polarization scrambling, our time-bin phase-encoding QKD setup is characterized with an interference fringe visibility of 98.72%. The extinction ratio for the phase states is kept between 18 and 21 dB for 6 h without active phase correction.
Photonics Research
2021, 9(2): 02000222
1 中国科学院半导体研究所集成光电子学国家重点联合实验室, 北京 100083
2 中国科学院大学材料科学与光电技术学院, 北京 100049
论述了光学相控阵的原理,回顾了光学相控阵的发展历程,特别是近年来硅光子相控阵的研究进展。利用与互补金属氧化物半导体(CMOS)工艺线相兼容的绝缘体上硅(SOI)技术实现了大规模的集成,目前国外报道的最大的硅光子相控阵集成了4096个阵元。在硅光子上实现的二维光束扫描角度可以达到46°×36°,光束宽度只有0.85°×0.18°,天线的损耗小于3 dB,且旁瓣抑制大于10 dB。此外,采用微机电系统(MEMS)器件实现的光学相控阵的光束扫描速度超过0.5 MHz。阐述了各种方式实现光学相控阵的优缺点,并对未来发展前景进行了展望。最后,介绍了光学相控阵在激光雷达、成像、**上的应用。
光学器件 光波导 光学相控阵 扫描角度 绝缘体上硅 激光与光电子学进展
2018, 55(2): 020006
Author Affiliations
Abstract
1 State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2 College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
Both the 4×20 GHz coarse wavelength division multiplexing and LAN-WDM receiver optical sub-assemblies (ROSAs) were developed. The ROSA package was hybrid integrated with a planar lightwave circuit arrayed waveguide grating (AWG) with 2% refractive index difference and a four-channel top-illuminated positive-intrinsic-negative photodetector (PD) array. The output waveguides of the AWG were designed in a multimode structure to provide flat-top optical spectra, and their end facet was angle-polished to form a total internal reflection interface to realize vertical coupling with a PD array. The maximum responsivity of ROSA was about 0.4 A/W, and its 3 dB bandwidth of frequency response was up to 20 GHz for each transmission lane. The hybrid integrated ROSA would be a cost-effective and easy-assembling solution for 100 GbE data center interconnections.
060.4230 Multiplexing 230.7370 Waveguides Chinese Optics Letters
2018, 16(6): 060603
1 中国科学院半导体研究所集成光电子学国家重点联合实验室, 北京 100083
2 中国科学院大学材料科学与光电技术学院, 北京 100049
现阶段的光模块封装类型已从小型可插拔(SFP)系列逐渐向100 Gb/s可插拔(CFP)系列和4通道SFP(QSFP)系列过渡, 传输速率最高可达400 Gb/s, 发射端激光器消光比大于9 dB, 光波分复用器插入损耗小于1 dB, 发射功率大于0.3 dBm, 接收端探测器响应度为0.7 A/W, 接收灵敏度小于-17 dBm。阐述了在数据中心光互连中可以应用于IEEE制定的40/100 GbE标准802.3 ba的发射和接收集成芯片, 主要包括分立器件组装芯片、混合集成芯片和单片集成芯片, 介绍了其各种类型的基本结构和特性。
光学器件 硅光子 波分复用 阵列波导光栅 数据中心 激光与光电子学进展
2016, 53(12): 120002
Author Affiliations
Abstract
We design and fabricate compact, low loss, and high port-count optical power splitters of 1 × 128 and2 × 128 using silica-based planar lightwave circuit (PLC) technology on 6 inch quartz substrate. PLC tech-nology is mainly based on plasma enhanced chemical vapor deposition, photolithography, and etching. The measured results show that the insertion loss, uniformity, and wavelength-dependent loss of 1 × 128 and 2 × 128 optical power splitters are less than 23, 1.43, and 0.92 dB and 23.3, 1.8, and 1.3 dB, respectively, in the wavelength range from 1.26 to 1.65 mm. The polarization-dependent losses are less than 0.16 and 0.2 dB, respectively, in the wavelengths of 1.31, 1.49, and 1.55 mm.
230.7370 Waveguides 230.1360 Beam splitters 230.7390 Waveguides, planar Chinese Optics Letters
2014, 12(9): 092302
中国科学院 半导体研究所 光电子研发中心,北京 100083
为了提高基于绝缘体上硅(Silicon on insulator,SOI)的Si微纳波导器件和光纤的耦合效率,设计了一种基于SOI和溶胶-凝胶杂化SiO2材料的新型微纳倒锥波导模斑转换器。此模斑转换器由Si微纳倒锥波导和溶胶-凝胶杂化SiO2矩形波导组成。使用三维束传播法(3D-BPM)对器件结构进行模拟优化。在倒锥波导模斑转换器的连接下,波长1550 nm,近似TE模的光源下的模拟结果显示:单模光纤和SOI的Si微纳波导的耦合效率达到了95％(损耗低于0.22 dB),结果可以有效地满足微纳波导器件和光纤的低损耗耦合的需要。
光学器件 模斑转换器 溶胶-凝胶 微纳波导 三维束传播法
中国科学院半导体研究所光电研发中心, 北京 100083
研究了基于硅基集成光波导的马赫-曾德干涉仪(MZI)型化学传感芯片的设计、制备及相关敏感特性的模拟和分析。传感芯片采用硅基二氧化硅光波导材料, 利用与传统互补型金属氧化物半导体(CMOS)兼容的工艺技术制作。通过波导的单模设计以及对MZI结构的优化, 获得了有效折射率分辨率达到10-7量级的高灵敏度传感芯片。作为化学传感器, 把MZI的其中一臂设计成传感臂, 并进行适当的表面修饰, 可制作出高灵敏度的干涉型光波导化学传感器。最后, 对该传感器的折射率分辨率、敏感特性等进行了分析、模拟, 同时, 对面临的关键问题进行了分析和讨论。
光波导传感 马赫-曾德干涉(MZI) 渐逝场 折射率 相位差
